Porous ceramic itself has numerous pores by the ceramic sintering
technology and is used for a vacuum chuck. It can serve as an air
flotation platform, widely used in semiconductor, panel, laser
process, and non-contact linear slide.
Absorb or float the workpiece by applying positive and negative
pressure gas, the workpieces include wafer, glass, PET film, or
other thin objects.
Application principle:
The airflow with negative vacuum pressure is set to enter the
ceramic, the workpiece can be adsorbed.
The airflow with positive vacuum pressure is set to go out of the
ceramic, the part can be blown up or not contact the ceramic.
Materials:
-Porous ceramics are made by alumina and silicon carbide, color
includes white, light brown, dark brown, blue-gray
-6″, 8″, 12″ regular size available in round, square, oval shape or
irregular shapes and sizes.
-Pore size includes 15um, 30um, 40um, 50um, 100um.
-Custom size is available for us
Characteristics include:
High flatness and parallelism
Compact and uniform microstructure with high strength
Good permeability and uniform adsorption affinity
Long lifetime
Dressing easily
Different types of Vacuum Chuck Table:
Thinning Chucks
Dicing Chucks
Cleaning Chucks
Transportation Chucks
Printing Chucks
Custom is available
Service
New and refurbished porous ceramic chucks for Disco, ADT, K&S,
Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc
dicing saws and grinders.
Characteristics Chart
| Product number | Density g/cm3 | Coefficient of elasticity GPa | Bending strength MPa | Coefficient of thermal expansion ×10-6/K | Coefficient of thermal conductivity W/m・K | Electrical resistance Ω・cm |
|---|
| Alumina | A995 | 3.9 | 380 | 450 | 7.3 | 30 | 30 |
| Alumina porous | - | 2.5 | 55 | 50 | 7.4 | - | 30 |
| Silicon carbide | Standard product | 3.1 | 410 | 500 | 4.6 | 170 | 170 |
| Silicon carbide porous | - | 2.1 | 55 | 50 | 4.7 | - | 26 |
